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We would like to kindly invite you to the next Micro- and Nanosystems seminar of this semester. Two presentations will be given on Friday, 12th April 2024, in CLA G2 at 13:30 by Ines Kraiem and Prof. Inês Figueiredo Pereira.

Date: 12.04.2024
Time: 13.30
Location: CLA G 2

Speaker: Ines Kraiem

Investigating the feasibility of local contact annealing in CNFET NO2 gas sensors
Field effect transistors with suspended carbon nanotube (CNT) channels make promising NO2 gas sensors in terms of limit of detection and power consumption. In addition, transient sensing and self-heating considerably lower the readout and recovery times of the sensor, without taking away from the original advantages of using CNTs as sensing material. While self-heating ensures heating the central region of the suspended CNT at low power price, accelerated desorption from the contact regions remains ineffective due to the metal contacts. In this talk, a CNT sensor architecture allowing the local annealing of the electrodes is presented, and the simulation results of adsorption and desorption of NO2 molecules are studied. In addition, a simplified fabrication process flow of such devices is proposed and discussed.

Speaker: Prof. Inês Figueiredo Pereira

Minimally invasive smart glaucoma implants
Glaucoma is a group of eye diseases that can cause vision loss and blindness. The most important risk factor is increased intraocular pressure, which results from an accumulation of fluid in the eye. Implantable glaucoma drainage devices have been developed to remove excess fluid from the eye, but they are often associated with severe postoperative complications. In this presentation, Inês will share the outcomes of her PhD research, concluded in July 2023, focusing on the development of two novel, minimally invasive and smart glaucoma implants. These implants have the potential to improve the outcomes of glaucoma filtration surgery and enhance the quality of life of glaucoma patients.

Talks Spring Semester 2024

19.04.2024 Matthias Dupuch Pressure Sensor Encapsulation for Ventricular Assist devices
Qinglan Shan, EPFL Learning in Mixed Reality for Microfabrication: taking photolithography as an example
26.04.2024 Cristina Gentili CNT-FET NO2 sensor: analysis of humidity cross-sensitivity
Seoho Jung Fabrication and Operation of Fast, Ultra-low-power Gas Sensors with Carbon Nanotubes
(10.05.2024
(17.05.2024)
24.05.2024 Morten Vollmann Focused ion beam deposition for strong mechanical clamping of CNT resonators.
31.05.2024 Lucrezia Maini Acoustic metamaterials for biomedical implants applications

Findmore MNS Events here

MNS News

01.11.2023 Welcome Hichem Ben Lakdhar, who will support the DigiPredict team in fabricating strain sensors with a focus on wire bonding processes. We wish him an excellent start.

24.10.2023 Katrina Klösel successfully defended her PhD thesis titled: "Multifunctional materials: exploiting the versatility of Bi2Se3 for multimodal sensing and zero power sensor systems". Congratulations!

01.09.2023 🚀Congratulation to the winner of the 🏆 𝟮𝗻𝗱 prize 𝗮𝗻𝗱 𝗮𝘂𝗱𝗶𝗲𝗻𝗰𝗲 𝗮𝘄𝗮𝗿𝗱 𝗦𝗲𝗼𝗵𝗼 𝗝𝘂𝗻𝗴 𝘄𝗶𝘁𝗵 𝗖𝗵𝗶𝗿𝗮𝗹 𝗡𝗮𝗻𝗼 of the 3Pi pitch competition 2023! Details view on external page3Pi ETH linkedincall_made

26.06.2023 Welcome to Robert John who starts as a process engineer working on DigiPredict H2020 project, supporting device fabrication and characterization. Please join me welcoming Robert and wish him an excellent start.

30.05.2023 Johannes Weichart successfully defended his PhD thesis titled: "Artificial Fingertip with Embedded High Resolution Tactile Sensing". Congratulations!

01.05.2023 Sira Bielefeldt started as process engineer and will work with Florin Püntener, Johannes Weichart and Dr. Cosmin Roman on the project on dynamic tactile sensors in our group. Please join me welcoming Sira and wish her an excellent start.

01.12.2022 Florin Püntener started as a PhD candidate and will work with Johannes Weichart on the project on dynamic tactile sensors in our group. Please join me welcoming Florin and wish him an excellent start.

01.11.2022 Please join us in a warm welcome to Ms Ines Kraiem, who starts her PhD Project today on the field of CNT gas sensors. Ms Kraiem graduated from RWTH Aachen and performed research on graphene.

01.10.2022 Welcome to Dr. Natanael Lanz, who starts his Pioneer Fellowship in our group today. Together with Seoho Jung and André Butzerin, PhD student at IWF, he will work towards the commercialization of CNT dry transfer processes and devices.

23.08.2022
Stefan Nedelcu successfully defended his PhD thesis. Congratulations! Title of the doctoral thesis: Energy Efficient Analog Mixed-Signal Front Ends for CNT-FET NO2 Air-Quality Nanosensors Number of the doctoral thesis: 28646

01.07.2022
Please join me to welcome Dr. Mainak Basu who will work on the H2020 Digipredict project for the exploration of CNT strain sensor for monitoring respiratory activities. We wish Mainak an excellent start and all the best for his new challenges.

26.04.2022
Ian A. Mihailovic successfully defended his PhD thesis.Congratulations!

19.04.2022 Congrats to the nomination of the top 5 inventions! To Johannes Weichart, Dr.Cosmin Roman and Prof. Christofer Hierold on the project of: "Structure for sensor integration in complex surfaces" view: Spark Award 2022

01.05.2021
Wecome to Cristina Gentili who will start her PhD project in the Micro-Nanosystems Group and wish both, her and Max an excellent start.

01.05.2021
We welcome Maximilian Aue as a Doctoral Student in the Micro-Nanosystems Group.

01.04.2021

Please join us to welcome Dr. Mathis Trant, Francesco Scipione and Samuele Demicheli to the MNS group. It is a great pleasure to have our new group members on board to pursue the Innosuisse Project with microGauge. We wish you an excellent start and a lot of success for your new challenge.

01.05.2020
Kishan Thodkar started as a post doc in our group. Please join me welcoming Kishan and wish him a good start!

01.02.2020
Lucrezia Maini started her PhD project in our group. Please join me welcoming Lucrezia and wish her a great start!

28.10.2019
Prof. Christofer Hierold is keynote speaker at external pageIEEE Sensors 2019 in Montreal, Canada titled external page"Concepts for Ultra Low Power Sensors"

23.-27.06.2019
Transducers & Eurosensors 2019 - external pageThe 20th International Conference on Solid-State Senors, Actuators and Microsystems takes place in Berlin - General Chair: Christofer Hierold - ETH Zürich, Switzerland Program Chair: Jürgen Brugger - EPFL, Switzerland

03.06.2019
Please welcome Morten Vollmann as new PhD student in the group. He will continue working on strainable CNT resonators.

27.05.2019
Laura Jenni successfully defended her PhD thesis titled "Optimization of Dry-Transferred CNTFET Contacts by Post-Transfer Processing". Congratulations!

13.05.2019
Sebastian Eberle successfully defended his PhD thesis titled "Ultra-clean suspended carbon nanotube gas sensors - concept for large scale fabrication and sensor characterization". Congratulations!

29.04.2019
Lalit Kumar successfully defended his PhD thesis titled "Energy Dissipation, Clamping and Motional Currents in Suspended Room Temperature Carbon Nanotube Resonators". Congratulations!

01.04.2019
Signe Lin Vehusheia started her PhD project in our group on implantable sensors. Please join me welcoming Signe Lin and wish her a good start!

04.03.2019
Please welcome Prof. Wang Xiaohong, Tsinghua University Beijing in our group. Prof. Wang is on sabbatical leave for six months at ETH Zürich. A warm welcome from all of us!

01.03.2019 Johannes Weichart will start a PhD project on dynamic tactile sensors in our group. Please join me welcoming Johannes and wish him an excellent start.

07.01.2019 Kanata Tanaka, a visiting student from Prof. Sawada’s group at Toyohashi University of Technology, started working with Stefan Nedelcu. Please join me welcoming Kanata and wish him a good start!

01.01.2019
Matthias Dupuch has decided to start his PhD with his project in our group. Please welcome Matthias and wish a good start!

01.01.2019 Katrina Klösel started her PhD project in our group on new TEG materials. Please join me welcoming Katrina and wish her a good start!

16.10.2018
Silvan Marc Staufert successfully defended his PhD thesis titled "Conformal Papylene-C Media Separating Membranes for Pressure Sensing Applications in Verticular Assist Devices". Congratulations!

23.05.2018 Michelle Müller successfully defended her PhD thesis titled "Micromechanical broadband vibration amplitude-amplifier for microseismic and acoustic emission detection". Congratulations!

02.05.2018 Verena Maiwald successfully defended her PhD thesis titled "A Microelectromechanical Switch for Bandpass Vibration Detection". Congratulations!

18.04.2018
Moritz Thielen successfully defended his PhD thesis titled "Thermal and Electrical Energy Converters and Interfaces for the Internet of Humans". Congratulations!

08.03.2018 Seoho Jung will start a new PhD thesis towards automated assembly of carbon nanotubes at MNS. Please join me welcoming Seoho and wish him a good start.

01.03.2018
We welcome Dr. Ali Özhan Altun as a post doc and pioneer fellow in our team. Please join in welcoming Ali and wish him all the best!

15.01.2018 "Learning from grasshoppers" Researchers at ETH Zurich have developed a new type of health-monitoring electrode that exhibits optimum adhesion to skin and can record high quality signals. Read more here!

14.01.2018
ETH has developed new electrodes (watch: external pageSRF Tagesschau)

13.01.2018 The paper "Skin Conformal Polymer Electrodes for Clinical ECG and EEG Recordings" by M. Thielen, C. Peters, C Hierold et al. is online on external pageWiley Online Library!

27.11.2017
The paper "Degradable Magnetic Composites for Minimally Invasive Interventions: Device Fabrication, Targeted Drug Delivery and Cytotoxicity Tests" by Christian Peters, Salvador Pané et al. is featured on external pageNanoScribe’s website. Congratulations!

23.10.2017
"An inspiring partnership" ETH Zurich and IBM Research opened the Binning and Rohrer Nanotechnology Center some six years ago. Check it out here!

01.10.2017
We welcome Cancan Blaser as a post doc in our team and wish her an excellent start at MNS.

07.07.2017
Dr. Christian Peters receives the Prix Omega 2017 for his PhD Thesis “Biodegradable Superparamagnetic Polymer Composites: From Material Identification to Device Application.” The annual prize is awarded for the outstanding PhD work in Switzerland, considering applications from the fields of microengineering, micro- and nanotechnology, solid-state physics and electronics, as well as chronometry throughout all universities in Switzerland.

”Congratulations!

18.09.2016
"The microdoctors in our bodies" is featured in the ETH Globe magazine! Check it out here!

02.05.2016
Ian Mihailovic will start a new PhD thesis towards nanostructured materials for TEGs and fabrication technology. Please join in welcoming Ian!

01.04.2016
We welcome Ms. Manuela Kägi as a Team Assistant and thank her in advance for future support!

28.01.2016
Prof. Henry Baltes receives the 2016 IEEE Robert Bosch Micro and Nano Electro Mechanical Systems Award "for contributions to the exploration and development of CMOS-MEMS, to production using IC foundries and MEMS post-processing, and for inspirational leadership in the worldwide MEMS community" !

28.01.2016
The paper "external pageDegradable Magnetic Composites for Minimally Invasive Interventions: Device Fabrication, Targeted Drug Delivery, and Cytotoxicity Tests" by Christian Peters, Salvador Pané et al. is featured on external pageNanoScribe’s application notes!

Additional Information

In the Micro- and Nanosystems (MNS) group, basic engineering research is dedicated to bringing new functionalities to micro and nanodevices by exploiting the properties of promising materials, focusing on sensing applications for environmental monitoring and internet-of-things.

Contact

ETH Zurich

D-MAVT
Chair in Micro and Nanosystems
Tannenstrasse 3
G floor
8092 Zurich
Switzerland

Open Positions

MNS open positions

How to Find Us

MNS location

Information on the coronavirus

The ETH task force headed by the Vice President for Infrastructure is monitoring developments in the coronavirus pandemic and will continue to draw up suitable measures as necessary. You can find constantly updated information on the coronavirus web page.

To ETH's coronavirus web page

Finding and blocking infection routes in hospitals

Digital epidemiologist Onicio Batista Leal Neto standing in front of an ETH building with his arms folded.

During the COVID-19 pandemic, hospitals often became hubs of infection. Researchers from ETH Zurich, EPFL and the ISI Foundation are developing a wearable tracking system for healthcare facilities that can identify the risks of infections. Initial tests in Switzerland and Africa show its potential.

27.02.2024

Acids help against airborne viruses

Man coughing, aerosol particles floating in the air in front of him

A new study by various Swiss universities shows that aerosols in indoor air can vary in acidity. This acidity determines how long viruses remain infectious in the air – with profound implications for virus transmission and strategies to contain it.

21.12.2022

Preparing for future coronavirus variants using artificial intelligence

Illustration of the detail view of coronaviruses.

Researchers at ETH Zurich have developed a method to explore the possibilities of how the pandemic virus could evolve. Thanks to their work, it may be possible to develop antibody therapies and vaccines that are more likely to be effective also against future viral variants.

04.09.2022